On chip energy storage enabled by hybrid nanomaterial

According to VTT, the technology could realise zero power autonomous devices required for the IoT. For the first time, it adds, silicon based micro-supercapacitors can compete with carbon and graphene based devices in terms of power, energy and durability.

The energy and power density of a supercapacitor depends on the surface area and conductivity of the solid electrodes. VTT’s research group has developed a hybrid nanomaterial electrode, which consists of porous silicon coated with a few nanometres of titanium nitride laid down by atomic layer deposition, creating a large conductive surface in a small volume.

VTT’s research group says it has taken integration to the extreme by including micro-supercapacitor energy storage in a chip. It says the device can store up to 0.2J and generate up to 2W when installed in a 1cm2 chip.

VTT is now looking for a partner to help commercialise the technique.